Process 1 wafer (NIPEK1) to send to grenoble for proximity effect aluminum kids
Wafer batch TO COMPLETE (500µm thick)
- Désoxydation wafer (Hélène, SPEC)
HF:ODI 1:20, 1'
rinçage ODI 1'
- evap nouveau canon SPEC
Add witness chip in the evap PEK1cd_3
Al 50 / Ti 10 / Au 1 (target Tc < 950mK)
Pumped 4h, open valve -> 2.5e-7mb - Ti pump 75nm @ 0.2nm/s -> P_sas = 7.7e-8 / P_ch = 3.7e-8mb (7.0 / 3.0e-8 gun off) - Al 51nm @ 1nm/s, 0°, spin 16°/s. P_evap = 2.3e-7 -> 1.1e-7 (gun off) - Ti 10.4nm @ 0.5nm/s, 0°, spin 16°/s. P_evap = 6.6e-8 -> 5.5e-8 (gun off) - Au 1.14nm @ 0.1nm/s, 0°, spin 16°/s. P_evap = 1.5e-7
mesures Néel ~ 650mK, Q_res ~ 12k, noise 20HZ/sqrt(Hz), no steep cutoff
Après tentative ratée la semaine d'avant (cause Laurent pas mis sous vide)
Process 1 wafer (KID_UCSB_NbSi_1) to send to Ben Mazin UCSB
Wafer batch G214 (3", DSP, 17.5-20kohm.cm)
- Désoxydation wafer (Hélène, SPEC)
HF:ODI 1:20, 1'
rinçage ODI 1'
- evap nouveau canon CSNSM. Mise sous vide dans la 1/2h qui suit.
NbSi 17.5%, 125nm
Fichier | Taille | Date | Attaché par | |||
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2014-12-08_NIPEK1.png Aucune description | 27.65 Ko | 00:16, 20 Déc 2014 | Helene_Le_Sueur | Actions |