2014-05

2014-05Edit

mardi 13/05 (birthday sample)

BPC2_S3

Real sample from BPC2 (24/04/2013), 10x3mm, Quantronics-type with ground plane and single lumped-LC.

Idea: Trying to make a real sample without changing anything in the design but without PEB.

Exposure: 30 kV, Spot 1, using the new 20 nm diameter gold particle to perform focus.
dev: MIBK/IPA=90s, IPA=30s, ODI=15s, MIF726=60s (refilled bottle in room P6 from the large bottle in the cleanroom), ODI=60s, Ethanol=15s. Gentle N2 dry.
obtical microscope: All look the same optically.
Evap:  Ar milling (3mA, 505V), Al 10nm +22deg with p=(8.0+/-0.3)x10^-7mbar, dynamic oxydation 150ubar for 10min, Ti-flash 150nm at 0.5nm/s, Al 60nm -22deg with p=(3.3+/-0.2)x10^-7mbar, O2 flush before venting.
Lift-Off: PG remover at 60°C
Obs: BPC2S3.zip. vertical parts did not work but it was possible to take some nice pictures of the fine Al-structure on top of the Al-Ti-Au sandwich. It is clearly visible that the ramp creates a smooth interface between the obtical- and e-beam structures.

mercredi-jeudi14-15/05

BPC2_S4

Real sample from BPC2 (24/04/2013), 10x3mm, Quantronics-type with ground plane and single lumped-LC.

Idea: Repeating BPC2_S3 but with the gold particles very close to the alignment markes (the ones at the edges of the sample) to improve the focussing of the e-beam.

Exposure: 30 kV, Spot 1. Software crashed several times so the alignement had to be repeated.
dev: MIBK/IPA=90s, IPA=30s, ODI=15s, MIF726=60s (refilled bottle in room P6 from the large bottle in the cleanroom), ODI=60s, Ethanol=15s. Gentle N2 dry and trying to blow along the island in order not to shift/rotate the hanging PMMA inside the loop of the crabe..
obtical microscope: All look the same optically.
Evap:  Ar milling (3mA, 505V) had to increase neutraliser current limit from 4A ti 4.2A due to "error -24", Al 10nm +22deg with p=(7.2+/-0.2)x10^-7mbar, dynamic oxydation 150ubar for 10min, Ti-flash 150nm at 0.5nm/s, Al 60nm -22deg with p=(3.0+/-0.2)x10^-7mbar, O2 flush before venting.
Lift-Off: done on the 15/05/2014. PG remover at 60°C but it took around 45min (usually 20-25min) and several US bursts at low power.
Obs: BPC2S4.zip. Resist residuals can be seen and it is not clear if one of the gates is connected to the island.

mercredi-jeudi15/05

BPC2_S5

Real sample from BPC2 (24/04/2013), 10x3mm, Quantronics-type with ground plane and single lumped-LC.

Idea: Repeating BPC2_S4.

Exposure: 30 kV, Spot 1.
dev: MIBK/IPA=90s, IPA=30s, ODI=15s, MIF726=60s (refilled bottle in room P6 from the large bottle in the cleanroom), ODI=60s, Ethanol=15s. Gentle N2 dry and trying to blow along the island in order not to shift/rotate the hanging PMMA inside the loop of the crabe..
obtical microscope: All look the same optically.
Evap:  Ar milling (3mA, 505V), Al 10nm +22deg with p=(7.7+/-0.4)x10^-7mbar, dynamic oxydation 150ubar for 10min, Ti-flash 150nm at 0.5nm/s, Al 60nm -22deg with p=(2.2+/-0.2)x10^-7mbar, O2 flush before venting.
Lift-Off: PG remover at 60°C and several US bursts at low power.
Obs: BPC2S5.zip. DC parts show a rotation of the inner part of the loop, clockwise for all of them. The main structure has a short between island and crabe arm, probably caused by mechanical stress.

To do: Embed crabe into the lead to which it is connected to such that the rotation of this free standing PMMA can not reach nearby PMMA and thus avoid sticking to it.

venredi16/05

BPC2_S6

Real sample from BPC2 (24/04/2013), 10x3mm, Quantronics-type with ground plane and single lumped-LC.

Idea: Similar to BPC2_S5 but embedding the crabe into the lead.

Exposure: 30 kV, Spot 1.
dev: MIBK/IPA=90s, IPA=30s, ODI=15s, MIF726=60s, ODI=60s, Ethanol=15s. Gentle N2 dry and trying to blow along the island in order not to shift/rotate the hanging PMMA inside the loop of the crabe..
obtical microscope: All look the same optically.
Evap:  Ar milling (3mA, 505V), Al 10nm +22deg with p=(8.2+/-0.3)x10^-7mbar, dynamic oxydation 150ubar for 10min, Ti-flash 150nm at 0.5nm/s, Al 60nm -22deg with p=(2.5+/-0.2)x10^-7mbar, O2 flush before venting.
Lift-Off (done on 19/05/2014): PG remover at 60°C  for 1h and several US bursts at low power.
Obs:  BPC2S6.zip

-main structure looks fine with each JJ having an overlap-area of around 150x40 nm^2.
-loop size is around 1.0 x 0.93 um^2.
-DC part: tested different amounts of embedding into the top lead of the crabe. From 200nm of vertical embedding up to 500 nm (in100nm steps). All of them look fine so it is possible to embed even more.

To do: Embed more of the crabe into the top lead and try one complete embedding.

Bonding of BPC2S6 on the PCB on which BPC1_3 was bonded beforehand.