Was this page helpful?

2015-11 RFSiB4
2015-11 RFSiB4Edit

    Wafer

    Date orientation resistivity dopant oxide layer ref. fabricant fournisseur
    11/2015 100 3k-4k B no 2451 university wafers

     

     

    Doping (IEF)

    Three thickness (38nm, 68nm, 122nm) - 200 tirs (B dose 2.4e16 cm-3) - Tc environ 450 mK

    Processing (IEF)

    - Litho laser: fichier 04_sigec_lambda2710bL1Inv et -L2Inv ; tête 4mm; E=85%, filtres 10%+30%; defoc 1900

    - RIE (CHF3, SF6, O2): 200 nm

    - Evap Al 150 nm for ground plane and leeds - bad adhesion
    - dicing without protection: Al went away on many parts. Out of 3 chips, only one left.

    Measurements (CSNSM)

    Left resonator (122 nm thickness), run 2015-11-28

    T-dep.PNGP-dep.PNG
    T-dep-zoom.PNG

    No hint of SiB. Al has weird behavior (don't understand the multiple resonances seen, it may be a problem with fabrication)

    Middle resonator (68 nm thickness), run 2015-12-11

    Now the line is measured with an isolator + filter between sample and amplifier -> no more ripples
    But still we can see nothing appearing / moving below 200mK. The resonances appear below 1.2K, which is pathological (not designed). Either SiB turns superconducting at 1.2K, or the Aluminium layer has a problem (discontinuities, not matched 50ohm, or else)

    T-dep_lowT.PNGT-dep_highT.PNG

    Comparison of the results of the 2 resonators: (one common feature at 9GHz -> probably extrinsic: ?bondings? ?box resonance?)

    15mK_left+middle.PNG

    For comparison, below, a similar design of lambda/2 resonator in NbSi (except the Lk is much larger, so for the same frequency, resonator is much shorter), with Tc 900mK, Al ground plane, same measurement setup (even lighter, as there was no isolator nor filter!). (+ the resonator was there coupled to a gate on the side). Fundamental is 3.5GHz. "Troubles" (unsimulated features) appear only above 9GHz.

    2013-09_CPB+NbSi-mask-v1_field-effect.png
    CQPSfe500k_full-range.PNG

    Was this page helpful?
    Mots clés (Modifier les mots clés)
    • No tags

    Fichiers 28

    FichierTailleDateAttaché par 
     15mK_left+middle.PNG
    Aucune description
    42.12 Ko16:59, 18 Déc 2015Helene_Le_SueurActions
     2013-09_CPB+NbSi-mask-v1_field-effect.png
    Aucune description
    108.73 Ko17:20, 18 Déc 2015Helene_Le_SueurActions
     2015-12-11_RFSiB4-mid.opj
    run 2015-12-11
    9.48 Mo16:59, 18 Déc 2015Helene_Le_SueurActions
     CQPSfe500k_full-range.PNG
    Aucune description
    29.91 Ko17:17, 18 Déc 2015Helene_Le_SueurActions
     doping.PNG
    Aucune description
    52.44 Ko17:26, 8 Déc 2015francesca_chiodiActions
     M_18ns_38nm.jpg
    Aucune description
    775.92 Ko17:19, 8 Déc 2015francesca_chiodiActions
     M_31ns_68nm_a.jpg
    Aucune description
    761.17 Ko17:19, 8 Déc 2015francesca_chiodiActions
     M_31ns_68nm_b.jpg
    Aucune description
    761.21 Ko17:19, 8 Déc 2015francesca_chiodiActions
     M_31ns_68nm_c.jpg
    Aucune description
    762.57 Ko17:19, 8 Déc 2015francesca_chiodiActions
     M_31ns_68nm_d.jpg
    Aucune description
    64.85 Ko17:19, 8 Déc 2015francesca_chiodiActions
     M_31ns_68nm_e.jpg
    Aucune description
    66.84 Ko17:19, 8 Déc 2015francesca_chiodiActions
     M_31ns_68nm_f.jpg
    Aucune description
    66.4 Ko17:19, 8 Déc 2015francesca_chiodiActions
     M_31ns_68nm_g.jpg
    Aucune description
    64.42 Ko17:19, 8 Déc 2015francesca_chiodiActions
     M_31ns_68nm_h.jpg
    Aucune description
    65.92 Ko17:19, 8 Déc 2015francesca_chiodiActions
     M_31ns_68nm_i.jpg
    Aucune description
    64.63 Ko17:20, 8 Déc 2015francesca_chiodiActions
     M_74ns_122nm.png
    Aucune description
    1727.07 Ko17:20, 8 Déc 2015francesca_chiodiActions
     P-dep.PNG
    Aucune description
    69.94 Ko12:53, 8 Déc 2015AdminActions
     sample-stitch1.jpg
    Aucune description
    484.45 Ko15:17, 25 Nov 2015AdminActions
     sample-stitch2.jpg
    Aucune description
    416.19 Ko15:17, 25 Nov 2015AdminActions
     sample-stitch3.jpg
    Aucune description
    463.98 Ko15:17, 25 Nov 2015AdminActions
     sample-stitch4.jpg
    Aucune description
    579.03 Ko15:17, 25 Nov 2015AdminActions
     sample-zoom.jpg
    Aucune description
    405.7 Ko15:17, 25 Nov 2015AdminActions
     sample.jpg
    Aucune description
    750.61 Ko15:17, 25 Nov 2015AdminActions
     SiB-lambda2710b.gds
    Fichier litho SiB4 (GILD: 20151023)
    32.31 Ko17:01, 8 Déc 2015francesca_chiodiActions
     T-dep-zoom.PNG
    left resonator
    48.71 Ko13:14, 8 Déc 2015AdminActions
     T-dep.PNG
    left resonator
    58.02 Ko12:51, 8 Déc 2015AdminActions
     T-dep_highT.PNG
    middle resonator
    33.78 Ko16:59, 18 Déc 2015Helene_Le_SueurActions
     T-dep_lowT.PNG
    middle resonator
    30.68 Ko16:59, 18 Déc 2015Helene_Le_SueurActions
    Vous devez être connecté pour poster un commentaire.
    Propulsé par MindTouch Core