Wafer
Date | orientation | resistivity | dopant | oxide layer | ref. fabricant | fournisseur |
11/2015 | 100 | 3k-4k | B | no | 2451 | university wafers |
Doping (IEF)
Three thickness (38nm, 68nm, 122nm) - 200 tirs (B dose 2.4e16 cm-3) - Tc environ 450 mK
Processing (IEF)
- Litho laser: fichier 04_sigec_lambda2710bL1Inv et -L2Inv ; tête 4mm; E=85%, filtres 10%+30%; defoc 1900
- RIE (CHF3, SF6, O2): 200 nm
- Evap Al 150 nm for ground plane and leeds - bad adhesion
- dicing without protection: Al went away on many parts. Out of 3 chips, only one left.
Measurements (CSNSM)
No hint of SiB. Al has weird behavior (don't understand the multiple resonances seen, it may be a problem with fabrication)
Now the line is measured with an isolator + filter between sample and amplifier -> no more ripples
But still we can see nothing appearing / moving below 200mK. The resonances appear below 1.2K, which is pathological (not designed). Either SiB turns superconducting at 1.2K, or the Aluminium layer has a problem (discontinuities, not matched 50ohm, or else)
Comparison of the results of the 2 resonators: (one common feature at 9GHz -> probably extrinsic: ?bondings? ?box resonance?)
For comparison, below, a similar design of lambda/2 resonator in NbSi (except the Lk is much larger, so for the same frequency, resonator is much shorter), with Tc 900mK, Al ground plane, same measurement setup (even lighter, as there was no isolator nor filter!). (+ the resonator was there coupled to a gate on the side). Fundamental is 3.5GHz. "Troubles" (unsimulated features) appear only above 9GHz.
Fichier | Taille | Date | Attaché par | |||
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15mK_left+middle.PNG Aucune description | 42.12 Ko | 16:59, 18 Déc 2015 | Helene_Le_Sueur | Actions | ||
2013-09_CPB+NbSi-mask-v1_field-effect.png Aucune description | 108.73 Ko | 17:20, 18 Déc 2015 | Helene_Le_Sueur | Actions | ||
2015-12-11_RFSiB4-mid.opj run 2015-12-11 | 9.48 Mo | 16:59, 18 Déc 2015 | Helene_Le_Sueur | Actions | ||
CQPSfe500k_full-range.PNG Aucune description | 29.91 Ko | 17:17, 18 Déc 2015 | Helene_Le_Sueur | Actions | ||
doping.PNG Aucune description | 52.44 Ko | 17:26, 8 Déc 2015 | francesca_chiodi | Actions | ||
M_18ns_38nm.jpg Aucune description | 775.92 Ko | 17:19, 8 Déc 2015 | francesca_chiodi | Actions | ||
M_31ns_68nm_a.jpg Aucune description | 761.17 Ko | 17:19, 8 Déc 2015 | francesca_chiodi | Actions | ||
M_31ns_68nm_b.jpg Aucune description | 761.21 Ko | 17:19, 8 Déc 2015 | francesca_chiodi | Actions | ||
M_31ns_68nm_c.jpg Aucune description | 762.57 Ko | 17:19, 8 Déc 2015 | francesca_chiodi | Actions | ||
M_31ns_68nm_d.jpg Aucune description | 64.85 Ko | 17:19, 8 Déc 2015 | francesca_chiodi | Actions | ||
M_31ns_68nm_e.jpg Aucune description | 66.84 Ko | 17:19, 8 Déc 2015 | francesca_chiodi | Actions | ||
M_31ns_68nm_f.jpg Aucune description | 66.4 Ko | 17:19, 8 Déc 2015 | francesca_chiodi | Actions | ||
M_31ns_68nm_g.jpg Aucune description | 64.42 Ko | 17:19, 8 Déc 2015 | francesca_chiodi | Actions | ||
M_31ns_68nm_h.jpg Aucune description | 65.92 Ko | 17:19, 8 Déc 2015 | francesca_chiodi | Actions | ||
M_31ns_68nm_i.jpg Aucune description | 64.63 Ko | 17:20, 8 Déc 2015 | francesca_chiodi | Actions | ||
M_74ns_122nm.png Aucune description | 1727.07 Ko | 17:20, 8 Déc 2015 | francesca_chiodi | Actions | ||
P-dep.PNG Aucune description | 69.94 Ko | 12:53, 8 Déc 2015 | Admin | Actions | ||
sample-stitch1.jpg Aucune description | 484.45 Ko | 15:17, 25 Nov 2015 | Admin | Actions | ||
sample-stitch2.jpg Aucune description | 416.19 Ko | 15:17, 25 Nov 2015 | Admin | Actions | ||
sample-stitch3.jpg Aucune description | 463.98 Ko | 15:17, 25 Nov 2015 | Admin | Actions | ||
sample-stitch4.jpg Aucune description | 579.03 Ko | 15:17, 25 Nov 2015 | Admin | Actions | ||
sample-zoom.jpg Aucune description | 405.7 Ko | 15:17, 25 Nov 2015 | Admin | Actions | ||
sample.jpg Aucune description | 750.61 Ko | 15:17, 25 Nov 2015 | Admin | Actions | ||
SiB-lambda2710b.gds Fichier litho SiB4 (GILD: 20151023) | 32.31 Ko | 17:01, 8 Déc 2015 | francesca_chiodi | Actions | ||
T-dep-zoom.PNG left resonator | 48.71 Ko | 13:14, 8 Déc 2015 | Admin | Actions | ||
T-dep.PNG left resonator | 58.02 Ko | 12:51, 8 Déc 2015 | Admin | Actions | ||
T-dep_highT.PNG middle resonator | 33.78 Ko | 16:59, 18 Déc 2015 | Helene_Le_Sueur | Actions | ||
T-dep_lowT.PNG middle resonator | 30.68 Ko | 16:59, 18 Déc 2015 | Helene_Le_Sueur | Actions |
Images 25 | ||
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left resonatorT-dep-zoom.PNG | left resonatorT-dep.PNG | middle resonatorT-dep_highT.PNG |
middle resonatorT-dep_lowT.PNG |