2010-10

2010-10Edit

vendredi 01/10/2010

- OBSERVATION OF TEST EBPG LITHO

After vistec "rabbit ear" pbm solved, testing several fracturation modes and current

Rq: resist=40g/L spinned at 5krpm (5krpm/s) for 60s, dvpt 30" in mibk + 10" ipa

Rq: height ~ 30microns, flat at ~ 2+-1micron/mm

Rq: dose multiplier for QPCs=1.5

Y=1: old fracturation

Y=1,1:

old problems seen week 16/9 now unseen

pbm (vertical shifts) on some QPC arrows in bottom

QPC opening (top, center)=212nm

Y=1,2: problem of arrow shift has disappeared => beam stabilisation issue (or charging effect) => set waiting time of 30"

Y=2: sweep X + optimize writing speed

no issues, QPC opening (top, center)=212nm

images taken on Y=2,1:

Y=4: I large=10nA (instead of 100nA)

no visible difference

mercredi 06/10/2010

Test fuite S818#1

Mesures entre 2 croix d'alignement de surface 20*20 µm² distante de 200 µm : R=90 MΩ dans la lumière, R=133 MΩ sans lumière. Soit en comptant deux résistances en série vers le gaz d'aire 1500 µm² une résitance de 1.5 10¹⁷ Ω/m².