e-beam: EBPG VISTEC (LPN)
e-beam: EBPG VISTEC (LPN)Edit

Sommaire

1. FILE CONVERSION
2. JOB PREPARATION
3. OPERATION LEICA

The design is made in LEdit. Cells, layers, datatypes are defined in the design.

Once the design made, export it as a GDSII file.

Transfer the file on errata by ssh, port 22. For example, use filezilla client with : hôte : sftp://errata, utilisateur : pierre, password : beamwriter

Using X-ming, you can emulate errata on your PC and use its software. Open LayoutBEAMER-3.3 to open the GDSII file, to extract the cells, and layers done with the same resolution and beam current. The option FDA allows to set a correcting multiplying factor to a dose corresponding to a datatype. Then export the gpf file with the option 5000+HR and 1.4. Usually, the resolution for smallest part is 0.0025 µm and for the larger part is 0.02 µm. Select the option entire layout so that the dimension of the full design is taken into account for each layer.

Transfer the file on difool by ftp protocol. Be sure to be in the errata's directory where the gpf file is stored. Write ftp difool, user : pg, password : beamwriter. Go to the directory where to put patterns. (cd users, cd fred, cd patterns), select bin for binary transfer then write put name of file.

Using X-ming, emulate difool on your pc, go to fred's environment by writing ce fred and then open cjob to prepare the insolation.

FILE CONVERSION

Login errata : pierre, beamwriter (remote connection via Xming)
LayoutBEAMER-3.3
   Import : * [else adjust " extent " manually in export]
   Export :
        Tab general :
Format type : 5000+HR
            Format version : 1.40
            Resolution : 0.0025 for 1 nA (0.02 for 10-100nA)
            Optimise : Writing speed
            Trapezoids : X (in that case the fast sweep direction is always X)
            Frac mode : 1 (2 is supposed to be better for circles)
        Tab advanced:
            Size: Field=160x160 for 2.5nm resolution
        Tab extent:
            In standard 2mmx1mm samples
            Lower left    X=0 Y=-1000
            Upper right X=2000, Y=0
Move the gpf file to difool with ftp (pg beamwriter)

JOB PREPARATION

Login difool: pg, beamwriter (remote connection via Xming)
ce fred
cjob
   drag&drop substrate
   exposure:
        Tab height:
            if none: pattern even if meas heigh does not work
            if check: check that meas heigh ok on all substrate, else does not pattern
            height map does not work yet
        Performance is unchecked
   Layout: enter exceptions
   Patterns
   Identifiers

OPERATION LEICA

Sample holder
   Prefer holder 2 (best markers for adj ebpg)
Sample should be aligned at better than xxxdeg (less than 20µm for 1cm shift)
Sample should be horizontal (VISTEC asks better than 1µm/mm, in practice the focus should stay perfect at max mag over the sample size)
With holder 2, the shift between optical and ebeam pos is: dX~0,dY~-80µm

ALWAYS 2ble check the sample holder tower is rotated in loadlock
NEVER vent before pumping is finished or pump before vent is finished, and push frankly for a good 1s on the touch screen button

Standard operations with mark alignment:
   subl n[n=holder]
   pg ar re be 1na
   sel hol n
   pg adj ebpg
   mov pos X,Y
   adjust manually the mark position with joystick window
        change subwindow with prev/next, modify field with arrows up/down, change step size with PF3/PF4
        SEM: 1 on, 0 off; PMHV: contrast (neg slope)
   subu n

Mark detection commands:
   pg marker set contra XX [e.g. XX=97 if detection is difficult, 95 is standard]
   pg info marker /test=PAR USER
   aussi pg marker set contra XX ??
   pg marker calibrate x,y marker_ident [e.g. marker_ident=TQ. Use another marker for calibration in adj ebpg]

Reset Stage:
   pg set stagelock 0
   mov home
   mvm

Reset ebpg electronics: XX   hot

Other useful commands:
   mvm x,y [detect default marker at x,y. If no pos, go to holder marker]
   meas curr
   pg sel pattern patternname [fixes resolution, ... important for ebpg]
   pg info sel [check selected pattern]
pg get PARAMNAME
pg set PARAMNAME
pg iab [info on selected beam, including beam size after an ebpg]
pg info arch beam [display the archived currents]
pg afa [auto focus & astigmatism, included in ebpg]
pg iaf [info auto focus]
pg info arch beam
pg ar sa beam XXX [e.g. XXX=1na, save beam param in XXX. After pg adj ebpg]
   pg get tab [meas stage pos and write value in var tab]
   pg get height /m [meas height and write vale in var height]


Launch job:
   Job nameofjob.job -c 9n[n=holder] 0[n if holder not loaded] X,Y[in µm by default]
        For a job without alignment, X,Y is the layout centre
        With alignment X,Y is the premarker position (should be first found manually)

Reopen Joystick window:
   Joy
   Then in window:
        a(dd) tab /m; a height /m; a sem; a semmag; a tab; a CC2 /D; a PMHV