Etching

EtchingEdit

Wet Etching

• Various web databases for chemical etching:

- Metallographic etch database: www.kaker.com (demo) or offline
- selective chemical etching
- Wet chemical etching of metals and semiconductors:  www.ee.byu.edu or offline
- Etch rates for micromachining processes  

• local recipes:

Recette - nettoyage In sur plaquette GaAs (LN)

Gravure profonde Si par KOH

Dry Etching

• Various databases for ion milling:

- University of Minesota

• local recipes:

CH3-CHF4 etch

O2 etch

XeF2 etch

• RIE SPEC:

Ar-CF4 etch