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vendredi 01/10/2010
- OBSERVATION OF TEST EBPG LITHO
After vistec "rabbit ear" pbm solved, testing several fracturation modes and current
Rq: resist=40g/L spinned at 5krpm (5krpm/s) for 60s, dvpt 30" in mibk + 10" ipa
Rq: height ~ 30microns, flat at ~ 2+-1micron/mm
Rq: dose multiplier for QPCs=1.5
Y=1: old fracturation
Y=1,1:
old problems seen week 16/9 now unseen
pbm (vertical shifts) on some QPC arrows in bottom
QPC opening (top, center)=212nm
Y=1,2: problem of arrow shift has disappeared => beam stabilisation issue (or charging effect) => set waiting time of 30"
Y=2: sweep X + optimize writing speed
no issues, QPC opening (top, center)=212nm
images taken on Y=2,1:
Y=4: I large=10nA (instead of 100nA)
no visible difference
mercredi 06/10/2010
Test fuite S818#1
Mesures entre 2 croix d'alignement de surface 20*20 µm2 distante de 200 µm : R=90 MΩ dans la lumière, R=133 MΩ sans lumière. Soit en comptant deux résistances en série vers le gaz d'aire 1500 µm2 une résitance de 1.5 1017 Ω/m2.
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Fichiers 13
| Fichier | Taille | Date | Attaché par | |||
|---|---|---|---|---|---|---|
 |  | 10-01_Y=1,2_bottom_gate.jpg Aucune description | 49.51 Ko | 20:15, 1 Oct 2010 | Admin | Actions |
|  | 10-01_Y=1_bottom_contact.jpg Aucune description | 283.47 Ko | 20:15, 1 Oct 2010 | Admin | Actions |
|  | 10-01_Y=1_bottom_gate.jpg Aucune description | 267.49 Ko | 20:15, 1 Oct 2010 | Admin | Actions |
|  | 10-01_Y=1_top_centerQPC.jpg Aucune description | 252.78 Ko | 20:16, 1 Oct 2010 | Admin | Actions |
|  | 10-01_Y=1_top_contact.jpg Aucune description | 287.46 Ko | 20:16, 1 Oct 2010 | Admin | Actions |
|  | 10-01_Y=1_top_gate.jpg Aucune description | 274.25 Ko | 20:16, 1 Oct 2010 | Admin | Actions |
|  | 10-01_Y=2,1_bottom_contact.jpg Aucune description | 56.61 Ko | 20:16, 1 Oct 2010 | Admin | Actions |
|  | 10-01_Y=2,1_bottom_gate.jpg Aucune description | 50.29 Ko | 20:16, 1 Oct 2010 | Admin | Actions |
|  | 10-01_Y=2,1_top_contact.jpg Aucune description | 55.11 Ko | 20:16, 1 Oct 2010 | Admin | Actions |
|  | 10-01_Y=2,1_top_gate.jpg Aucune description | 51.55 Ko | 20:16, 1 Oct 2010 | Admin | Actions |
|  | 10-01_Y=2,1_top_QPC.jpg Aucune description | 41.03 Ko | 20:17, 1 Oct 2010 | Admin | Actions |
 | 10-01_Y=4,1_bottom_contact.jpg Aucune description | 55.54 Ko | 10:38, 1 Oct 2010 | Frederic_Pierre | Actions | |
 | 10-01_Y=4,1_top_contact.jpg Aucune description | 55.78 Ko | 10:38, 1 Oct 2010 | Frederic_Pierre | Actions | |
| Images 13 | ||
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